I Systems, Inc. - 323 Andover Street - Wilmington, MA 01887
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Some Thoughts on Inspection
Email I Systems
I Systems, Inc. - 323 Andover Street - Wilmington, MA 01887
Join the Mailing List or Request Literature
Some Thoughts on Inspection
Email I Systems
The Semiautomatic System is comprised of two major components. The first is the Mechanical Staging that transports the camera and optics to various pre-programmed locations. Both the X and Y axes are driven by lead screw The table which holds the wafer moves in the Y axis, and an overhead gantry moves the camera and optics in the X axis. Alternatively, a platform with X, Y travel and stationary optics is also available. The Focus axis has 2 inches of travel. The optics assembly consists of a high resolution (470 ines), color, S-VHS, CCD camera programmable zoom lens which provides for a variety of viewing magnifications (zoom ratio's up to 10:1 are available). Field of view size is directly proportional to magnification. The Image is displayed on either a high resolution video monitor or integrated inot the computer monitor through an image capture card.
The second major component is the control unit that is situated below the inspection station. The control unit contains the Pentium computer, motion amplifier cards, power supply and interface connectors.
The Semiautomatic Inspection software allows the user to pre-program inspection points within a die, then step and repeat the pattern over the entire wafer, save and run the program. Inspection defect data, can be stored and retrieved quickly. Setup, time can be almost completely eliminated by importing a prober file similar data the defines the wafer map.
Camera, Optics and Lighting
The system uses a color, S-VHS, CCD camera to be collectioed image data. Optionally, a 3-Clip Color CCD camera can be used. The 3-Chip camera provides approximately 50% more resolution. The output of the camera is displayed directly to the 13", S-VHS, color video monitor for operating viewing. The image can also be displayed on the computer monitor through an image capture card. A System uses co-axial illumination. The optics consist of a programmable zoom lens and microscope objective (usually 5x or 10x). The zoom lens provides a 6.5:1 (up to 10:1 is available) zoom ratio. A dual optical configuration which allows the user to inspect both sides of a die simultaneously is also available.
In Marker:
The AV650 uses industry standard Xandex ink markers. The ink markers are either pneumatic or solenoid driven. There us a wude range of ink cartridges available to choose from. Cartridge type dictates ink dot size and color.
